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Description
System-level modeling of MEMS -
microelectromechanical systems - comprises integrated approaches to
simulate, understand, and optimize the performance of sensors,
actuators, and microsystems, taking into account the intricacies of the
interplay between mechanical and electrical properties, circuitry,
packaging, and design considerations. Thereby, system-level modeling
overcomes the limitations inherent to methods that focus only on one of
these aspects and do not incorporate their mutual dependencies.

The
book addresses the two most important approaches of system-level
modeling, namely physics-based modeling with lumped elements and
mathematical modeling employing model order reduction methods, with an
emphasis on combining single device models to entire systems. At a
clearly understandable and sufficiently detailed level the readers are
made familiar with the physical and mathematical underpinnings of MEMS
modeling. This enables them to choose the adequate methods for the
respective application needs.

This work is an invaluable resource
for all materials scientists, electrical engineers, scientists working
in the semiconductor and/or sensor
industry, physicists, and physical chemists.

Table of Contents
About the Editors XIX
Series Editor Preface XXI
Volume Editors Preface XXIII
List of Contributors XXVII
فهرست:
Part I Physical and Mathematical Fundamentals

Introduction: Issues in Microsystems Modeling

System-Level Modeling of MEMS Using Generalized Kirchhoffian Networks – Basic Principles

System-Level Modeling of MEMS by Means of Model Order Reduction (Mathematical Approximations) – Mathematical Background

Algorithmic Approaches for System-Level Simulation of MEMS and Aspects of Cosimulation

Part II Lumped Element Modeling Method for MEMS Devices

System-Level Modeling of Surface Micromachined Beamlike Electrothermal
Microactuators

System-Level Modeling of Packaging Effects of MEMS Devices

Mixed-Level Approach for the Modeling of Distributed Effects in Microsystems

Compact Modeling of RF-MEMS Devices

Part III Mathematical Model Order Reduction for MEMS Devices

9 Moment-Matching-Based Linear Model Order Reduction for Nonparametric and Parametric Electrothermal MEMS Models

Projection-Based Nonlinear Model Order Reduction

Linear and Nonlinear Model Order Reduction for MEMS Electrostatic Actuators

Modal-Superposition-Based Nonlinear Model Order Reduction for MEMS Gyroscopes

Part IV Modeling of Entire Microsystems

Towards System-Level Simulation of Energy Harvesting Modules

Application of Reduced Order Models in Circuit-Level Design for RF MEMS Devices

SystemC AMS and Cosimulation Aspects

System Level Modeling of Electromechanical Sigma–Delta Modulators for Inertial MEMS Sensors

Part V Software Implementations

3D Parametric-Library-Based MEMS/IC Design

MOR for ANSYS

Reduced Order Modeling of MEMS and IC Systems – A Practical Approach

Web-Based Community for Modeling and Design of MEMS

SUGAR: A SPICE for MEMS

Model Order Reduction Implementations in Commercial MEMS Design Environment



لینک کتاب در آمازون:
قیمت : 200 دلار
http://www.amazon.com/System-level-Modeling-MEMS-Volume-10/dp/3527319034

لینک کتاب وایلی:
قیمت:142 یورو
http://eu.wiley.com/WileyCDA/WileyTitle/productCd-3527319034.html

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